Raman spectroscopy investigation of the H content of heated hard amorphous carbon layers
نویسندگان
چکیده
We revisit here how Raman microscopy can be used to estimate the H content in hydrogenated amorphous carbon layers. The H content was varied from 2 at.% to 30 at.%, using heat treatments from room temperature to 1300 K and was determined independently using ion beam analysis. We examine the correlation of various Raman parameters and the consistency of their thermal evolution with thermodesorption results. We show that the HD/HG parameter is linear in the full range of H content and can thus be used to estimate the H content. Conversely, we show that the m/HG parameter should be used with care, first because it is sensitive to photoluminescence quenching processes and second because it is sensitive to only H bonded to C(sp). We also identify a weak band at 860 cm attributed to H bonded to C(sp
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